12/3/2010	8:39:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/3/2010	8:39:26 AM	Recipe started at 8:39 AM
12/3/2010	8:39:26 AM	H2 valve closed
12/3/2010	8:39:26 AM	BCl3 valve closed
12/3/2010	8:39:26 AM	PH3 valve closed
12/3/2010	8:39:26 AM	SiCl4 pre valve closed
12/3/2010	8:39:26 AM	SiCl4 post valve closed
12/3/2010	8:39:26 AM	Main Vac valve closed
12/3/2010	8:39:26 AM	Bypass valve closed
12/3/2010	8:39:26 AM	Bubbler valve closed
12/3/2010	8:39:26 AM	Helium valve opened
12/3/2010	8:39:26 AM	Helium MFC set to  500.000000
12/3/2010	8:39:26 AM	H2 MFC set to  0.000000
12/3/2010	8:39:26 AM	BCl3 MFC set to  0.000000
12/3/2010	8:39:26 AM	PHl3 MFC set to  0.000000
12/3/2010	8:39:26 AM	SiCl4 MFC set to  0.000000
12/3/2010	8:39:26 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	8:39:26 AM	Tube furnace set to 0
12/3/2010	8:40:47 AM	Helium valve closed
12/3/2010	8:40:47 AM	H2 valve closed
12/3/2010	8:40:47 AM	BCl3 valve closed
12/3/2010	8:40:47 AM	PH3 valve closed
12/3/2010	8:40:47 AM	SiCl4 pre valve closed
12/3/2010	8:40:47 AM	SiCl4 post valve closed
12/3/2010	8:40:47 AM	Main Vac valve closed
12/3/2010	8:40:47 AM	Bypass valve closed
12/3/2010	8:40:47 AM	Bubbler valve closed
12/3/2010	8:40:47 AM	Helium MFC set to  0.000000
12/3/2010	8:40:47 AM	H2 MFC set to  0.000000
12/3/2010	8:40:47 AM	BCl3 MFC set to  0.000000
12/3/2010	8:40:47 AM	PHl3 MFC set to  0.000000
12/3/2010	8:40:47 AM	SiCl4 MFC set to  0.000000
12/3/2010	8:40:47 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	8:40:47 AM	Tube furnace set to 0
12/3/2010	8:40:47 AM	Run finished at 8:40 AM
12/3/2010	8:40:47 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/3/2010	8:56:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/3/2010	8:56:16 AM	Recipe started at 8:56 AM
12/3/2010	8:56:16 AM	Helium valve closed
12/3/2010	8:56:16 AM	H2 valve closed
12/3/2010	8:56:16 AM	BCl3 valve closed
12/3/2010	8:56:16 AM	PH3 valve closed
12/3/2010	8:56:16 AM	SiCl4 pre valve closed
12/3/2010	8:56:16 AM	SiCl4 post valve closed
12/3/2010	8:56:16 AM	Main Vac valve closed
12/3/2010	8:56:16 AM	Bubbler valve closed
12/3/2010	8:56:16 AM	Bypass valve opened
12/3/2010	8:56:16 AM	Helium MFC set to  0.000000
12/3/2010	8:56:16 AM	H2 MFC set to  0.000000
12/3/2010	8:56:16 AM	BCl3 MFC set to  0.000000
12/3/2010	8:56:16 AM	PHl3 MFC set to  0.000000
12/3/2010	8:56:16 AM	SiCl4 MFC set to  0.000000
12/3/2010	8:56:16 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	8:56:17 AM	Tube furnace set to 0
12/3/2010	8:57:09 AM	Helium valve closed
12/3/2010	8:57:09 AM	H2 valve closed
12/3/2010	8:57:09 AM	BCl3 valve closed
12/3/2010	8:57:09 AM	PH3 valve closed
12/3/2010	8:57:09 AM	SiCl4 pre valve closed
12/3/2010	8:57:09 AM	SiCl4 post valve closed
12/3/2010	8:57:09 AM	Bubbler valve closed
12/3/2010	8:57:09 AM	Main Vac valve opened
12/3/2010	8:57:09 AM	Bypass valve opened
12/3/2010	8:57:09 AM	Helium MFC set to  0.000000
12/3/2010	8:57:09 AM	H2 MFC set to  0.000000
12/3/2010	8:57:09 AM	BCl3 MFC set to  0.000000
12/3/2010	8:57:09 AM	PHl3 MFC set to  0.000000
12/3/2010	8:57:09 AM	SiCl4 MFC set to  0.000000
12/3/2010	8:57:09 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	8:57:10 AM	Tube furnace set to 0
12/3/2010	8:57:10 AM	Run finished at 8:57 AM
12/3/2010	8:57:10 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/3/2010	8:57:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/3/2010	8:58:07 AM	Recipe started at 8:58 AM
12/3/2010	8:58:07 AM	Helium valve closed
12/3/2010	8:58:07 AM	H2 valve closed
12/3/2010	8:58:07 AM	BCl3 valve closed
12/3/2010	8:58:07 AM	PH3 valve closed
12/3/2010	8:58:07 AM	SiCl4 pre valve closed
12/3/2010	8:58:07 AM	SiCl4 post valve closed
12/3/2010	8:58:07 AM	Main Vac valve closed
12/3/2010	8:58:07 AM	Bubbler valve closed
12/3/2010	8:58:07 AM	Bypass valve opened
12/3/2010	8:58:07 AM	Helium MFC set to  0.000000
12/3/2010	8:58:07 AM	H2 MFC set to  0.000000
12/3/2010	8:58:07 AM	BCl3 MFC set to  0.000000
12/3/2010	8:58:07 AM	PHl3 MFC set to  0.000000
12/3/2010	8:58:07 AM	SiCl4 MFC set to  0.000000
12/3/2010	8:58:07 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	8:58:07 AM	Tube furnace set to 0
12/3/2010	8:58:07 AM	Helium valve closed
12/3/2010	8:58:07 AM	H2 valve closed
12/3/2010	8:58:07 AM	BCl3 valve closed
12/3/2010	8:58:07 AM	PH3 valve closed
12/3/2010	8:58:07 AM	SiCl4 pre valve closed
12/3/2010	8:58:07 AM	SiCl4 post valve closed
12/3/2010	8:58:07 AM	Bubbler valve closed
12/3/2010	8:58:07 AM	Main Vac valve opened
12/3/2010	8:58:07 AM	Bypass valve opened
12/3/2010	8:58:07 AM	Helium MFC set to  0.000000
12/3/2010	8:58:07 AM	H2 MFC set to  0.000000
12/3/2010	8:58:07 AM	BCl3 MFC set to  0.000000
12/3/2010	8:58:07 AM	PHl3 MFC set to  0.000000
12/3/2010	8:58:07 AM	SiCl4 MFC set to  0.000000
12/3/2010	8:58:07 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	8:58:07 AM	Tube furnace set to 0
12/3/2010	8:59:07 AM	H2 valve closed
12/3/2010	8:59:07 AM	BCl3 valve closed
12/3/2010	8:59:07 AM	PH3 valve closed
12/3/2010	8:59:07 AM	SiCl4 pre valve closed
12/3/2010	8:59:07 AM	SiCl4 post valve closed
12/3/2010	8:59:07 AM	Bubbler valve closed
12/3/2010	8:59:07 AM	Helium valve opened
12/3/2010	8:59:07 AM	Main Vac valve opened
12/3/2010	8:59:07 AM	Bypass valve opened
12/3/2010	8:59:07 AM	Helium MFC set to  100.000000
12/3/2010	8:59:07 AM	H2 MFC set to  0.000000
12/3/2010	8:59:07 AM	BCl3 MFC set to  0.000000
12/3/2010	8:59:07 AM	PHl3 MFC set to  0.000000
12/3/2010	8:59:07 AM	SiCl4 MFC set to  0.000000
12/3/2010	8:59:07 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	8:59:07 AM	Tube furnace set to 0
12/3/2010	9:00:07 AM	Helium valve closed
12/3/2010	9:00:07 AM	H2 valve closed
12/3/2010	9:00:08 AM	BCl3 valve closed
12/3/2010	9:00:08 AM	PH3 valve closed
12/3/2010	9:00:08 AM	SiCl4 pre valve closed
12/3/2010	9:00:08 AM	SiCl4 post valve closed
12/3/2010	9:00:08 AM	Bubbler valve closed
12/3/2010	9:00:08 AM	Main Vac valve opened
12/3/2010	9:00:08 AM	Bypass valve opened
12/3/2010	9:00:08 AM	Helium MFC set to  0.000000
12/3/2010	9:00:08 AM	H2 MFC set to  0.000000
12/3/2010	9:00:08 AM	BCl3 MFC set to  0.000000
12/3/2010	9:00:08 AM	PHl3 MFC set to  0.000000
12/3/2010	9:00:08 AM	SiCl4 MFC set to  0.000000
12/3/2010	9:00:08 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	9:00:08 AM	Tube furnace set to 0
12/3/2010	9:01:08 AM	H2 valve closed
12/3/2010	9:01:08 AM	BCl3 valve closed
12/3/2010	9:01:08 AM	PH3 valve closed
12/3/2010	9:01:08 AM	SiCl4 pre valve closed
12/3/2010	9:01:08 AM	SiCl4 post valve closed
12/3/2010	9:01:08 AM	Bubbler valve closed
12/3/2010	9:01:08 AM	Helium valve opened
12/3/2010	9:01:08 AM	Main Vac valve opened
12/3/2010	9:01:08 AM	Bypass valve opened
12/3/2010	9:01:08 AM	Helium MFC set to  100.000000
12/3/2010	9:01:08 AM	H2 MFC set to  0.000000
12/3/2010	9:01:08 AM	BCl3 MFC set to  0.000000
12/3/2010	9:01:08 AM	PHl3 MFC set to  0.000000
12/3/2010	9:01:08 AM	SiCl4 MFC set to  0.000000
12/3/2010	9:01:08 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	9:01:08 AM	Tube furnace set to 0
12/3/2010	9:02:08 AM	Helium valve closed
12/3/2010	9:02:08 AM	H2 valve closed
12/3/2010	9:02:08 AM	BCl3 valve closed
12/3/2010	9:02:08 AM	PH3 valve closed
12/3/2010	9:02:08 AM	SiCl4 pre valve closed
12/3/2010	9:02:08 AM	SiCl4 post valve closed
12/3/2010	9:02:08 AM	Bubbler valve closed
12/3/2010	9:02:08 AM	Main Vac valve opened
12/3/2010	9:02:08 AM	Bypass valve opened
12/3/2010	9:02:08 AM	Helium MFC set to  0.000000
12/3/2010	9:02:08 AM	H2 MFC set to  0.000000
12/3/2010	9:02:08 AM	BCl3 MFC set to  0.000000
12/3/2010	9:02:08 AM	PHl3 MFC set to  0.000000
12/3/2010	9:02:08 AM	SiCl4 MFC set to  0.000000
12/3/2010	9:02:08 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	9:02:08 AM	Tube furnace set to 0
12/3/2010	9:03:08 AM	H2 valve closed
12/3/2010	9:03:08 AM	BCl3 valve closed
12/3/2010	9:03:08 AM	PH3 valve closed
12/3/2010	9:03:08 AM	SiCl4 pre valve closed
12/3/2010	9:03:08 AM	SiCl4 post valve closed
12/3/2010	9:03:08 AM	Bubbler valve closed
12/3/2010	9:03:08 AM	Helium valve opened
12/3/2010	9:03:08 AM	Main Vac valve opened
12/3/2010	9:03:08 AM	Bypass valve opened
12/3/2010	9:03:08 AM	Helium MFC set to  100.000000
12/3/2010	9:03:08 AM	H2 MFC set to  0.000000
12/3/2010	9:03:08 AM	BCl3 MFC set to  0.000000
12/3/2010	9:03:08 AM	PHl3 MFC set to  0.000000
12/3/2010	9:03:08 AM	SiCl4 MFC set to  0.000000
12/3/2010	9:03:08 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	9:03:08 AM	Tube furnace set to 0
12/3/2010	9:04:08 AM	Helium valve closed
12/3/2010	9:04:08 AM	H2 valve closed
12/3/2010	9:04:08 AM	BCl3 valve closed
12/3/2010	9:04:08 AM	PH3 valve closed
12/3/2010	9:04:08 AM	SiCl4 pre valve closed
12/3/2010	9:04:08 AM	SiCl4 post valve closed
12/3/2010	9:04:08 AM	Bubbler valve closed
12/3/2010	9:04:08 AM	Main Vac valve opened
12/3/2010	9:04:08 AM	Bypass valve opened
12/3/2010	9:04:08 AM	Helium MFC set to  0.000000
12/3/2010	9:04:08 AM	H2 MFC set to  0.000000
12/3/2010	9:04:08 AM	BCl3 MFC set to  0.000000
12/3/2010	9:04:08 AM	PHl3 MFC set to  0.000000
12/3/2010	9:04:08 AM	SiCl4 MFC set to  0.000000
12/3/2010	9:04:08 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	9:04:08 AM	Tube furnace set to 0
12/3/2010	9:05:08 AM	H2 valve closed
12/3/2010	9:05:08 AM	BCl3 valve closed
12/3/2010	9:05:08 AM	PH3 valve closed
12/3/2010	9:05:08 AM	SiCl4 pre valve closed
12/3/2010	9:05:08 AM	SiCl4 post valve closed
12/3/2010	9:05:08 AM	Bubbler valve closed
12/3/2010	9:05:08 AM	Helium valve opened
12/3/2010	9:05:08 AM	Main Vac valve opened
12/3/2010	9:05:08 AM	Bypass valve opened
12/3/2010	9:05:08 AM	Helium MFC set to  100.000000
12/3/2010	9:05:08 AM	H2 MFC set to  0.000000
12/3/2010	9:05:09 AM	BCl3 MFC set to  0.000000
12/3/2010	9:05:09 AM	PHl3 MFC set to  0.000000
12/3/2010	9:05:09 AM	SiCl4 MFC set to  0.000000
12/3/2010	9:05:09 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	9:05:09 AM	Tube furnace set to 0
12/3/2010	9:06:09 AM	Helium valve closed
12/3/2010	9:06:09 AM	H2 valve closed
12/3/2010	9:06:09 AM	BCl3 valve closed
12/3/2010	9:06:09 AM	PH3 valve closed
12/3/2010	9:06:09 AM	SiCl4 pre valve closed
12/3/2010	9:06:09 AM	SiCl4 post valve closed
12/3/2010	9:06:09 AM	Bubbler valve closed
12/3/2010	9:06:09 AM	Main Vac valve opened
12/3/2010	9:06:09 AM	Bypass valve opened
12/3/2010	9:06:09 AM	Helium MFC set to  0.000000
12/3/2010	9:06:09 AM	H2 MFC set to  0.000000
12/3/2010	9:06:09 AM	BCl3 MFC set to  0.000000
12/3/2010	9:06:09 AM	PHl3 MFC set to  0.000000
12/3/2010	9:06:09 AM	SiCl4 MFC set to  0.000000
12/3/2010	9:06:09 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	9:06:09 AM	Tube furnace set to 0
12/3/2010	9:07:09 AM	H2 valve closed
12/3/2010	9:07:09 AM	BCl3 valve closed
12/3/2010	9:07:09 AM	PH3 valve closed
12/3/2010	9:07:09 AM	SiCl4 pre valve closed
12/3/2010	9:07:09 AM	SiCl4 post valve closed
12/3/2010	9:07:09 AM	Bubbler valve closed
12/3/2010	9:07:09 AM	Helium valve opened
12/3/2010	9:07:09 AM	Main Vac valve opened
12/3/2010	9:07:09 AM	Bypass valve opened
12/3/2010	9:07:09 AM	Helium MFC set to  100.000000
12/3/2010	9:07:09 AM	H2 MFC set to  0.000000
12/3/2010	9:07:09 AM	BCl3 MFC set to  0.000000
12/3/2010	9:07:09 AM	PHl3 MFC set to  0.000000
12/3/2010	9:07:09 AM	SiCl4 MFC set to  0.000000
12/3/2010	9:07:09 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	9:07:09 AM	Tube furnace set to 0
12/3/2010	9:08:09 AM	Helium valve closed
12/3/2010	9:08:09 AM	H2 valve closed
12/3/2010	9:08:09 AM	BCl3 valve closed
12/3/2010	9:08:09 AM	PH3 valve closed
12/3/2010	9:08:09 AM	SiCl4 pre valve closed
12/3/2010	9:08:09 AM	SiCl4 post valve closed
12/3/2010	9:08:09 AM	Bubbler valve closed
12/3/2010	9:08:09 AM	Main Vac valve opened
12/3/2010	9:08:09 AM	Bypass valve opened
12/3/2010	9:08:09 AM	Helium MFC set to  0.000000
12/3/2010	9:08:09 AM	H2 MFC set to  0.000000
12/3/2010	9:08:09 AM	BCl3 MFC set to  0.000000
12/3/2010	9:08:09 AM	PHl3 MFC set to  0.000000
12/3/2010	9:08:09 AM	SiCl4 MFC set to  0.000000
12/3/2010	9:08:09 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	9:08:09 AM	Tube furnace set to 0
12/3/2010	9:09:09 AM	H2 valve closed
12/3/2010	9:09:09 AM	BCl3 valve closed
12/3/2010	9:09:09 AM	PH3 valve closed
12/3/2010	9:09:09 AM	SiCl4 pre valve closed
12/3/2010	9:09:09 AM	SiCl4 post valve closed
12/3/2010	9:09:09 AM	Bubbler valve closed
12/3/2010	9:09:09 AM	Helium valve opened
12/3/2010	9:09:09 AM	Main Vac valve opened
12/3/2010	9:09:09 AM	Bypass valve opened
12/3/2010	9:09:09 AM	Helium MFC set to  100.000000
12/3/2010	9:09:09 AM	H2 MFC set to  0.000000
12/3/2010	9:09:09 AM	BCl3 MFC set to  0.000000
12/3/2010	9:09:09 AM	PHl3 MFC set to  0.000000
12/3/2010	9:09:09 AM	SiCl4 MFC set to  0.000000
12/3/2010	9:09:09 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	9:09:09 AM	Tube furnace set to 0
12/3/2010	9:10:09 AM	Helium valve closed
12/3/2010	9:10:09 AM	H2 valve closed
12/3/2010	9:10:09 AM	BCl3 valve closed
12/3/2010	9:10:09 AM	PH3 valve closed
12/3/2010	9:10:09 AM	SiCl4 pre valve closed
12/3/2010	9:10:09 AM	SiCl4 post valve closed
12/3/2010	9:10:09 AM	Bubbler valve closed
12/3/2010	9:10:09 AM	Main Vac valve opened
12/3/2010	9:10:09 AM	Bypass valve opened
12/3/2010	9:10:09 AM	Helium MFC set to  0.000000
12/3/2010	9:10:09 AM	H2 MFC set to  0.000000
12/3/2010	9:10:10 AM	BCl3 MFC set to  0.000000
12/3/2010	9:10:10 AM	PHl3 MFC set to  0.000000
12/3/2010	9:10:10 AM	SiCl4 MFC set to  0.000000
12/3/2010	9:10:10 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	9:10:10 AM	Tube furnace set to 0
12/3/2010	9:11:10 AM	H2 valve closed
12/3/2010	9:11:10 AM	BCl3 valve closed
12/3/2010	9:11:10 AM	PH3 valve closed
12/3/2010	9:11:10 AM	SiCl4 pre valve closed
12/3/2010	9:11:10 AM	SiCl4 post valve closed
12/3/2010	9:11:10 AM	Bubbler valve closed
12/3/2010	9:11:10 AM	Helium valve opened
12/3/2010	9:11:10 AM	Main Vac valve opened
12/3/2010	9:11:10 AM	Bypass valve opened
12/3/2010	9:11:10 AM	Helium MFC set to  100.000000
12/3/2010	9:11:10 AM	H2 MFC set to  0.000000
12/3/2010	9:11:10 AM	BCl3 MFC set to  0.000000
12/3/2010	9:11:10 AM	PHl3 MFC set to  0.000000
12/3/2010	9:11:10 AM	SiCl4 MFC set to  0.000000
12/3/2010	9:11:10 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	9:11:10 AM	Tube furnace set to 0
12/3/2010	9:12:10 AM	Helium valve closed
12/3/2010	9:12:10 AM	H2 valve closed
12/3/2010	9:12:10 AM	BCl3 valve closed
12/3/2010	9:12:10 AM	PH3 valve closed
12/3/2010	9:12:10 AM	SiCl4 pre valve closed
12/3/2010	9:12:10 AM	SiCl4 post valve closed
12/3/2010	9:12:10 AM	Bubbler valve closed
12/3/2010	9:12:10 AM	Main Vac valve opened
12/3/2010	9:12:10 AM	Bypass valve opened
12/3/2010	9:12:10 AM	Helium MFC set to  0.000000
12/3/2010	9:12:10 AM	H2 MFC set to  0.000000
12/3/2010	9:12:10 AM	BCl3 MFC set to  0.000000
12/3/2010	9:12:10 AM	PHl3 MFC set to  0.000000
12/3/2010	9:12:10 AM	SiCl4 MFC set to  0.000000
12/3/2010	9:12:10 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	9:12:10 AM	Tube furnace set to 0
12/3/2010	9:13:10 AM	H2 valve closed
12/3/2010	9:13:10 AM	BCl3 valve closed
12/3/2010	9:13:10 AM	PH3 valve closed
12/3/2010	9:13:10 AM	SiCl4 pre valve closed
12/3/2010	9:13:10 AM	SiCl4 post valve closed
12/3/2010	9:13:10 AM	Bubbler valve closed
12/3/2010	9:13:10 AM	Helium valve opened
12/3/2010	9:13:10 AM	Main Vac valve opened
12/3/2010	9:13:10 AM	Bypass valve opened
12/3/2010	9:13:10 AM	Helium MFC set to  100.000000
12/3/2010	9:13:10 AM	H2 MFC set to  0.000000
12/3/2010	9:13:10 AM	BCl3 MFC set to  0.000000
12/3/2010	9:13:10 AM	PHl3 MFC set to  0.000000
12/3/2010	9:13:10 AM	SiCl4 MFC set to  0.000000
12/3/2010	9:13:10 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	9:13:10 AM	Tube furnace set to 0
12/3/2010	9:14:10 AM	Helium valve closed
12/3/2010	9:14:10 AM	H2 valve closed
12/3/2010	9:14:10 AM	BCl3 valve closed
12/3/2010	9:14:10 AM	PH3 valve closed
12/3/2010	9:14:10 AM	SiCl4 pre valve closed
12/3/2010	9:14:10 AM	SiCl4 post valve closed
12/3/2010	9:14:10 AM	Bubbler valve closed
12/3/2010	9:14:10 AM	Main Vac valve opened
12/3/2010	9:14:10 AM	Bypass valve opened
12/3/2010	9:14:10 AM	Helium MFC set to  0.000000
12/3/2010	9:14:10 AM	H2 MFC set to  0.000000
12/3/2010	9:14:10 AM	BCl3 MFC set to  0.000000
12/3/2010	9:14:10 AM	PHl3 MFC set to  0.000000
12/3/2010	9:14:10 AM	SiCl4 MFC set to  0.000000
12/3/2010	9:14:10 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	9:14:10 AM	Tube furnace set to 0
12/3/2010	9:15:10 AM	H2 valve closed
12/3/2010	9:15:10 AM	BCl3 valve closed
12/3/2010	9:15:10 AM	PH3 valve closed
12/3/2010	9:15:10 AM	SiCl4 pre valve closed
12/3/2010	9:15:10 AM	SiCl4 post valve closed
12/3/2010	9:15:10 AM	Bubbler valve closed
12/3/2010	9:15:10 AM	Helium valve opened
12/3/2010	9:15:10 AM	Main Vac valve opened
12/3/2010	9:15:10 AM	Bypass valve opened
12/3/2010	9:15:10 AM	Helium MFC set to  100.000000
12/3/2010	9:15:10 AM	H2 MFC set to  0.000000
12/3/2010	9:15:10 AM	BCl3 MFC set to  0.000000
12/3/2010	9:15:10 AM	PHl3 MFC set to  0.000000
12/3/2010	9:15:10 AM	SiCl4 MFC set to  0.000000
12/3/2010	9:15:10 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	9:15:11 AM	Tube furnace set to 0
12/3/2010	9:16:11 AM	Helium valve closed
12/3/2010	9:16:11 AM	H2 valve closed
12/3/2010	9:16:11 AM	BCl3 valve closed
12/3/2010	9:16:11 AM	PH3 valve closed
12/3/2010	9:16:11 AM	SiCl4 pre valve closed
12/3/2010	9:16:11 AM	SiCl4 post valve closed
12/3/2010	9:16:11 AM	Bubbler valve closed
12/3/2010	9:16:11 AM	Main Vac valve opened
12/3/2010	9:16:11 AM	Bypass valve opened
12/3/2010	9:16:11 AM	Helium MFC set to  0.000000
12/3/2010	9:16:11 AM	H2 MFC set to  0.000000
12/3/2010	9:16:11 AM	BCl3 MFC set to  0.000000
12/3/2010	9:16:11 AM	PHl3 MFC set to  0.000000
12/3/2010	9:16:11 AM	SiCl4 MFC set to  0.000000
12/3/2010	9:16:11 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	9:16:11 AM	Tube furnace set to 0
12/3/2010	9:17:11 AM	H2 valve closed
12/3/2010	9:17:11 AM	BCl3 valve closed
12/3/2010	9:17:11 AM	PH3 valve closed
12/3/2010	9:17:11 AM	SiCl4 pre valve closed
12/3/2010	9:17:11 AM	SiCl4 post valve closed
12/3/2010	9:17:11 AM	Bubbler valve closed
12/3/2010	9:17:11 AM	Helium valve opened
12/3/2010	9:17:11 AM	Main Vac valve opened
12/3/2010	9:17:11 AM	Bypass valve opened
12/3/2010	9:17:11 AM	Helium MFC set to  100.000000
12/3/2010	9:17:11 AM	H2 MFC set to  0.000000
12/3/2010	9:17:11 AM	BCl3 MFC set to  0.000000
12/3/2010	9:17:11 AM	PHl3 MFC set to  0.000000
12/3/2010	9:17:11 AM	SiCl4 MFC set to  0.000000
12/3/2010	9:17:11 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	9:17:11 AM	Tube furnace set to 0
12/3/2010	9:18:11 AM	Helium valve closed
12/3/2010	9:18:11 AM	H2 valve closed
12/3/2010	9:18:11 AM	BCl3 valve closed
12/3/2010	9:18:11 AM	PH3 valve closed
12/3/2010	9:18:11 AM	SiCl4 pre valve closed
12/3/2010	9:18:11 AM	SiCl4 post valve closed
12/3/2010	9:18:11 AM	Bubbler valve closed
12/3/2010	9:18:11 AM	Main Vac valve opened
12/3/2010	9:18:11 AM	Bypass valve opened
12/3/2010	9:18:11 AM	Helium MFC set to  0.000000
12/3/2010	9:18:11 AM	H2 MFC set to  0.000000
12/3/2010	9:18:11 AM	BCl3 MFC set to  0.000000
12/3/2010	9:18:11 AM	PHl3 MFC set to  0.000000
12/3/2010	9:18:11 AM	SiCl4 MFC set to  0.000000
12/3/2010	9:18:11 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	9:18:11 AM	Tube furnace set to 0
12/3/2010	9:18:12 AM	Run finished at 9:18 AM
12/3/2010	9:18:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/3/2010	9:22:30 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/3/2010	9:22:30 AM	Recipe started at 9:22 AM
12/3/2010	9:22:30 AM	Helium valve closed
12/3/2010	9:22:30 AM	H2 valve closed
12/3/2010	9:22:30 AM	BCl3 valve closed
12/3/2010	9:22:30 AM	PH3 valve closed
12/3/2010	9:22:30 AM	SiCl4 pre valve closed
12/3/2010	9:22:30 AM	SiCl4 post valve closed
12/3/2010	9:22:30 AM	Main Vac valve closed
12/3/2010	9:22:30 AM	Bypass valve closed
12/3/2010	9:22:30 AM	Bubbler valve closed
12/3/2010	9:22:30 AM	Helium MFC set to  0.000000
12/3/2010	9:22:31 AM	H2 MFC set to  0.000000
12/3/2010	9:22:31 AM	BCl3 MFC set to  0.000000
12/3/2010	9:22:31 AM	PHl3 MFC set to  0.000000
12/3/2010	9:22:31 AM	SiCl4 MFC set to  0.000000
12/3/2010	9:22:31 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	9:22:31 AM	Tube furnace set to 0
12/3/2010	9:22:31 AM	Run finished at 9:22 AM
12/3/2010	9:22:31 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/3/2010	9:23:37 AM	Recipe started at 9:23 AM
12/3/2010	9:23:37 AM	Helium valve closed
12/3/2010	9:23:37 AM	BCl3 valve closed
12/3/2010	9:23:37 AM	PH3 valve closed
12/3/2010	9:23:37 AM	SiCl4 pre valve closed
12/3/2010	9:23:37 AM	SiCl4 post valve closed
12/3/2010	9:23:37 AM	Main Vac valve closed
12/3/2010	9:23:37 AM	Bypass valve closed
12/3/2010	9:23:37 AM	Bubbler valve closed
12/3/2010	9:23:37 AM	H2 valve opened
12/3/2010	9:23:37 AM	Helium MFC set to  0.000000
12/3/2010	9:23:37 AM	H2 MFC set to  500.000000
12/3/2010	9:23:37 AM	BCl3 MFC set to  0.000000
12/3/2010	9:23:37 AM	PHl3 MFC set to  0.000000
12/3/2010	9:23:37 AM	SiCl4 MFC set to  0.000000
12/3/2010	9:23:37 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	9:23:37 AM	Tube furnace set to 100
12/3/2010	9:24:57 AM	Helium valve closed
12/3/2010	9:24:57 AM	BCl3 valve closed
12/3/2010	9:24:57 AM	PH3 valve closed
12/3/2010	9:24:57 AM	SiCl4 pre valve closed
12/3/2010	9:24:57 AM	SiCl4 post valve closed
12/3/2010	9:24:57 AM	Main Vac valve closed
12/3/2010	9:24:57 AM	Bypass valve closed
12/3/2010	9:24:57 AM	H2 valve opened
12/3/2010	9:24:57 AM	Bubbler valve opened
12/3/2010	9:24:57 AM	Helium MFC set to  0.000000
12/3/2010	9:24:57 AM	H2 MFC set to  500.000000
12/3/2010	9:24:57 AM	BCl3 MFC set to  0.000000
12/3/2010	9:24:57 AM	PHl3 MFC set to  0.000000
12/3/2010	9:24:57 AM	SiCl4 MFC set to  0.000000
12/3/2010	9:24:57 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	9:24:58 AM	Tube furnace set to 1000
12/3/2010	9:24:58 AM	Helium valve closed
12/3/2010	9:24:58 AM	H2 valve closed
12/3/2010	9:24:58 AM	BCl3 valve closed
12/3/2010	9:24:58 AM	PH3 valve closed
12/3/2010	9:24:58 AM	SiCl4 pre valve closed
12/3/2010	9:24:58 AM	SiCl4 post valve closed
12/3/2010	9:24:58 AM	Main Vac valve closed
12/3/2010	9:24:58 AM	Bubbler valve closed
12/3/2010	9:24:58 AM	Bypass valve closed
12/3/2010	9:24:58 AM	Helium MFC set to  0.000000
12/3/2010	9:24:58 AM	H2 MFC set to  0.000000
12/3/2010	9:24:58 AM	BCl3 MFC set to  0.000000
12/3/2010	9:24:58 AM	PHl3 MFC set to  0.000000
12/3/2010	9:24:58 AM	SiCl4 MFC set to  0.000000
12/3/2010	9:24:58 AM	Bypass solenoid MFC set to  760.000000
12/3/2010	9:24:58 AM	Tube furnace set to 0
12/3/2010	9:24:58 AM	Baratron reads 745.401633 Torr and NaOH valve is open.  Emergency exit.
12/3/2010	9:41:38 AM	Run aborted at 9:41 AM
12/3/2010	9:41:57 AM	Bubbler valve closed
12/3/2010	9:41:59 AM	Bubbler valve opened
12/3/2010	9:42:03 AM	Bubbler valve closed
12/3/2010	9:42:08 AM	Bypass valve opened
12/3/2010	9:42:41 AM	Main Vac valve opened
12/3/2010	9:42:44 AM	Tube furnace set to 0
12/3/2010	9:42:48 AM	H2 valve closed
12/3/2010	9:42:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/3/2010	9:42:55 AM	Recipe started at 9:42 AM
12/3/2010	9:42:55 AM	Helium valve closed
12/3/2010	9:42:55 AM	H2 valve closed
12/3/2010	9:42:55 AM	BCl3 valve closed
12/3/2010	9:42:55 AM	PH3 valve closed
12/3/2010	9:42:55 AM	SiCl4 pre valve closed
12/3/2010	9:42:55 AM	SiCl4 post valve closed
12/3/2010	9:42:55 AM	Main Vac valve closed
12/3/2010	9:42:55 AM	Bypass valve closed
12/3/2010	9:42:55 AM	Bubbler valve closed
12/3/2010	9:42:55 AM	Helium MFC set to  0.000000
12/3/2010	9:42:55 AM	H2 MFC set to  0.000000
12/3/2010	9:42:55 AM	BCl3 MFC set to  0.000000
12/3/2010	9:42:55 AM	PHl3 MFC set to  0.000000
12/3/2010	9:42:55 AM	SiCl4 MFC set to  0.000000
12/3/2010	9:42:55 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	9:42:55 AM	Tube furnace set to 0
12/3/2010	9:42:55 AM	Run finished at 9:42 AM
12/3/2010	9:42:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
12/3/2010	9:42:58 AM	Bypass valve opened
12/3/2010	9:42:58 AM	Main Vac valve opened
12/3/2010	10:40:23 AM	Recipe started at 10:40 AM
12/3/2010	10:40:23 AM	Helium valve closed
12/3/2010	10:40:23 AM	BCl3 valve closed
12/3/2010	10:40:23 AM	PH3 valve closed
12/3/2010	10:40:23 AM	SiCl4 pre valve closed
12/3/2010	10:40:23 AM	SiCl4 post valve closed
12/3/2010	10:40:23 AM	Main Vac valve closed
12/3/2010	10:40:23 AM	Bypass valve closed
12/3/2010	10:40:23 AM	Bubbler valve closed
12/3/2010	10:40:23 AM	H2 valve opened
12/3/2010	10:40:23 AM	Helium MFC set to  0.000000
12/3/2010	10:40:23 AM	H2 MFC set to  500.000000
12/3/2010	10:40:23 AM	BCl3 MFC set to  0.000000
12/3/2010	10:40:23 AM	PHl3 MFC set to  0.000000
12/3/2010	10:40:23 AM	SiCl4 MFC set to  0.000000
12/3/2010	10:40:23 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	10:40:23 AM	Tube furnace set to 100
12/3/2010	10:41:45 AM	Helium valve closed
12/3/2010	10:41:45 AM	BCl3 valve closed
12/3/2010	10:41:45 AM	PH3 valve closed
12/3/2010	10:41:45 AM	SiCl4 pre valve closed
12/3/2010	10:41:45 AM	SiCl4 post valve closed
12/3/2010	10:41:45 AM	Main Vac valve closed
12/3/2010	10:41:45 AM	Bypass valve closed
12/3/2010	10:41:45 AM	H2 valve opened
12/3/2010	10:41:45 AM	Bubbler valve opened
12/3/2010	10:41:45 AM	Helium MFC set to  0.000000
12/3/2010	10:41:45 AM	H2 MFC set to  500.000000
12/3/2010	10:41:45 AM	BCl3 MFC set to  0.000000
12/3/2010	10:41:45 AM	PHl3 MFC set to  0.000000
12/3/2010	10:41:45 AM	SiCl4 MFC set to  0.000000
12/3/2010	10:41:45 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	10:41:45 AM	Tube furnace set to 1000
12/3/2010	11:01:45 AM	Helium valve closed
12/3/2010	11:01:45 AM	PH3 valve closed
12/3/2010	11:01:45 AM	Main Vac valve closed
12/3/2010	11:01:45 AM	Bypass valve closed
12/3/2010	11:01:45 AM	H2 valve opened
12/3/2010	11:01:45 AM	BCl3 valve opened
12/3/2010	11:01:45 AM	SiCl4 pre valve opened
12/3/2010	11:01:45 AM	SiCl4 post valve opened
12/3/2010	11:01:45 AM	Bubbler valve opened
12/3/2010	11:01:45 AM	Helium MFC set to  0.000000
12/3/2010	11:01:45 AM	H2 MFC set to  500.000000
12/3/2010	11:01:45 AM	BCl3 MFC set to  10.000000
12/3/2010	11:01:45 AM	PHl3 MFC set to  0.000000
12/3/2010	11:01:45 AM	SiCl4 MFC set to  50.000000
12/3/2010	11:01:45 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	11:01:45 AM	Tube furnace set to 1000
12/3/2010	11:13:45 AM	H2 valve closed
12/3/2010	11:13:45 AM	BCl3 valve closed
12/3/2010	11:13:45 AM	PH3 valve closed
12/3/2010	11:13:45 AM	SiCl4 pre valve closed
12/3/2010	11:13:45 AM	SiCl4 post valve closed
12/3/2010	11:13:45 AM	Main Vac valve closed
12/3/2010	11:13:45 AM	Bypass valve closed
12/3/2010	11:13:45 AM	Helium valve opened
12/3/2010	11:13:45 AM	Bubbler valve opened
12/3/2010	11:13:45 AM	Helium MFC set to  500.000000
12/3/2010	11:13:45 AM	H2 MFC set to  0.000000
12/3/2010	11:13:45 AM	BCl3 MFC set to  0.000000
12/3/2010	11:13:45 AM	PHl3 MFC set to  0.000000
12/3/2010	11:13:45 AM	SiCl4 MFC set to  0.000000
12/3/2010	11:13:45 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	11:13:46 AM	Tube furnace set to 0
12/3/2010	11:33:46 AM	Helium valve closed
12/3/2010	11:33:46 AM	H2 valve closed
12/3/2010	11:33:46 AM	BCl3 valve closed
12/3/2010	11:33:46 AM	PH3 valve closed
12/3/2010	11:33:46 AM	SiCl4 pre valve closed
12/3/2010	11:33:46 AM	SiCl4 post valve closed
12/3/2010	11:33:46 AM	Main Vac valve closed
12/3/2010	11:33:46 AM	Bypass valve closed
12/3/2010	11:33:46 AM	Bubbler valve closed
12/3/2010	11:33:46 AM	Helium MFC set to  0.000000
12/3/2010	11:33:46 AM	H2 MFC set to  0.000000
12/3/2010	11:33:46 AM	BCl3 MFC set to  0.000000
12/3/2010	11:33:46 AM	PHl3 MFC set to  0.000000
12/3/2010	11:33:46 AM	SiCl4 MFC set to  0.000000
12/3/2010	11:33:46 AM	Bypass solenoid MFC set to  0.000000
12/3/2010	11:33:46 AM	Tube furnace set to 0
12/3/2010	11:33:46 AM	Run finished at 11:33 AM
12/3/2010	1:26:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/3/2010	1:26:14 PM	Recipe started at 1:26 PM
12/3/2010	1:26:14 PM	Helium valve closed
12/3/2010	1:26:14 PM	H2 valve closed
12/3/2010	1:26:14 PM	BCl3 valve closed
12/3/2010	1:26:14 PM	PH3 valve closed
12/3/2010	1:26:14 PM	SiCl4 pre valve closed
12/3/2010	1:26:14 PM	SiCl4 post valve closed
12/3/2010	1:26:14 PM	Main Vac valve closed
12/3/2010	1:26:14 PM	Bubbler valve closed
12/3/2010	1:26:14 PM	Bypass valve opened
12/3/2010	1:26:14 PM	Helium MFC set to  0.000000
12/3/2010	1:26:14 PM	H2 MFC set to  0.000000
12/3/2010	1:26:14 PM	BCl3 MFC set to  0.000000
12/3/2010	1:26:14 PM	PHl3 MFC set to  0.000000
12/3/2010	1:26:14 PM	SiCl4 MFC set to  0.000000
12/3/2010	1:26:14 PM	Bypass solenoid MFC set to  0.000000
12/3/2010	1:26:14 PM	Tube furnace set to 0
12/3/2010	1:27:06 PM	Helium valve closed
12/3/2010	1:27:06 PM	H2 valve closed
12/3/2010	1:27:06 PM	BCl3 valve closed
12/3/2010	1:27:06 PM	PH3 valve closed
12/3/2010	1:27:06 PM	SiCl4 pre valve closed
12/3/2010	1:27:06 PM	SiCl4 post valve closed
12/3/2010	1:27:06 PM	Bubbler valve closed
12/3/2010	1:27:06 PM	Main Vac valve opened
12/3/2010	1:27:06 PM	Bypass valve opened
12/3/2010	1:27:06 PM	Helium MFC set to  0.000000
12/3/2010	1:27:06 PM	H2 MFC set to  0.000000
12/3/2010	1:27:06 PM	BCl3 MFC set to  0.000000
12/3/2010	1:27:06 PM	PHl3 MFC set to  0.000000
12/3/2010	1:27:06 PM	SiCl4 MFC set to  0.000000
12/3/2010	1:27:06 PM	Bypass solenoid MFC set to  0.000000
12/3/2010	1:27:06 PM	Tube furnace set to 0
12/3/2010	1:27:07 PM	Run finished at 1:27 PM
12/3/2010	1:27:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
